Authors

Tokei, Zsolt; Roussel, Philippe; Stucchi, Michele; Versluijs, Janko; Ciofi, Ivan; Carbonell, Laure; Beyer, Gerald; Cockburn, Andrew; Augustin, M.; Shah, Kavita

Conference

IEEE International Interconnect Technology Conference - IITC

Title

Impact of LER on BEOL dielectric reliability: a quantitative model and experimental validation

Publication type

Proceedings paper