Publication:

Impact of LER on BEOL dielectric reliability: a quantitative model and experimental validation

Date

2009
Proceedings Paper
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dc.contributor.authorTokei, Zsolt
dc.contributor.authorRoussel, Philippe
dc.contributor.authorStucchi, Michele
dc.contributor.authorVersluijs, Janko
dc.contributor.authorCiofi, Ivan
dc.contributor.authorCarbonell, Laure
dc.contributor.authorBeyer, Gerald
dc.contributor.authorCockburn, Andrew
dc.contributor.authorAugustin, M.
dc.contributor.authorShah, Kavita
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorRoussel, Philippe
dc.contributor.imecauthorStucchi, Michele
dc.contributor.imecauthorVersluijs, Janko
dc.contributor.imecauthorCiofi, Ivan
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorCockburn, Andrew
dc.contributor.orcidimecRoussel, Philippe::0000-0002-0402-8225
dc.contributor.orcidimecCiofi, Ivan::0000-0003-1374-4116
dc.date.accessioned2021-10-18T03:39:21Z
dc.date.available2021-10-18T03:39:21Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16313
dc.source.beginpage228
dc.source.conferenceIEEE International Interconnect Technology Conference - IITC
dc.source.conferencedate1/06/2009
dc.source.conferencelocationSapporo, Hokkaido Japan
dc.source.endpage230
dc.title

Impact of LER on BEOL dielectric reliability: a quantitative model and experimental validation

dc.typeProceedings paper
dspace.entity.typePublication
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