Browsing by author "Pierrat, C."
Now showing items 1-2 of 2
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Extending ArF to the 65-nm node with full-phase lithography
Driessen, Frank; Pierrat, C.; Vandenberghe, Geert; Ronse, Kurt; Van Adrichem, Paul; Liu, H.Y. (2003) -
Full phase-shifting methodology for 65-nm node lithography
Pierrat, C.; Driessen, Frank; Vandenberghe, Geert (2003)