Browsing by author "Gilis, G."
Now showing items 1-1 of 1
-
Ultra-thin oxide growth on silicon using ozonated solutions
De Smedt, Frank; Vinckier, Chris; Cornelissen, Ingrid; De Gendt, Stefan; Meuris, Marc; Gilis, G.; Heyns, Marc (1998)
Now showing items 1-1 of 1