Browsing by author "Waiblinger, Markus"
Now showing items 1-4 of 4
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Ebeam based mask repair as door opener for defect free EUV masks
Waiblinger, Markus; Bret, Tristan; Jonckheere, Rik; Van Den Heuvel, Dieter (2012) -
Repair of natural EUV reticle defects
Jonckheere, Rik; Bret, Tristan; Van Den Heuvel, Dieter; Magana, John F.; Gao, Weimin; Waiblinger, Markus (2011) -
Study of multilayer defects on sub-32nm HP EUV reticles
Van Den Heuvel, Dieter; Jonckheere, Rik; Bret, Tristan; Waiblinger, Markus (2012) -
The door opener for EUV mask repair
Waiblinger, Markus; Jonckheere, Rik; Bret, Tristan; Van Den Heuvel, Dieter; Baur, C; Baralia, G (2012)