Browsing by author "Sphabmixay, Kim"

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Electrical performance, reliability and microstructure of sub-45 nm copper damascene lines fabricated with TEOS backfill

Sphabmixay, Kim; Van Olmen, Jan; Moon, Kwang Jin; Vanstreels, Kris; D'Haen, Jan; Tokei, Zsolt; List, S.; Beyer, Gerald (2007)