Authors

Sphabmixay, Kim; Van Olmen, Jan; Moon, Kwang Jin; Vanstreels, Kris; D'Haen, Jan; Tokei, Zsolt; List, S.; Beyer, Gerald

Issue

11

Journal

Microelectronic Engineering

Volume

84

Title

Electrical performance, reliability and microstructure of sub-45 nm copper damascene lines fabricated with TEOS backfill

Publication type

Journal article

Embargo date

9999-12-31