Browsing by author "Sagi, K.V."
Now showing items 1-3 of 3
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Chemical mechanical polishing and planarization of Mn-based barrier/Ru liner films in Cu interconnects for advanced metallization nodes
Sagi, K.V.; Teugels, Lieve; van der Veen, Marleen; Struyf, Herbert; Babu, S.V. (2017) -
Chemical mechanical polishing of chemical vapor deposited Co films with minimal corrosion in the Cu/Co/Mn/SiCOH patterned structures
Sagi, K.V.; Teugels, Lieve; van der Veen, Marleen; Struyf, Herbert; Alety, S.R.; Babu, S.V. (2017) -
Investigation of guanidine carbonate-based slurries for chemical Mechanical polishing of Ru/TiN barrier films with minimal corrosion
Sagi, K.V.; Amanapu, H.P.; Teugels, Lieve; Babu, S.V. (2014)