Browsing by author "Yoshida, Yukifuni"
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Effect of dilute hydrogen peroxide in ultrapure water on SiGe epitaxial process
Masaoka, Toru; Gan, Nobuko; Fujimura, Yu; Ogawa, Yuichi; Wostyn, Kurt; Pacco, Antoine; Yoshida, Yukifuni; Holsteyns, Frank (2016)