Browsing by author "Jang, Stephen"

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Accurate models for EUV simulation and their use for design correction

Lorusso, Gian; Hermans, Jan; Baudemprez, Bart; Hendrickx, Eric; Klostermann, Ulrich K.; Jang, Stephen; Zavyalova, Lena; Sorensen, Jacob; Gao, Weimin; Lucas, Kevin (2009)
EUV modeling accruracy and integration requirements for the 16nm node

Zavyalova, Lena; Su, Irene; Jang, Stephen; Cobb, Jonathan; Ward, Brian; Sorensen, Jacob; Song, Hua; Gao, Weimin; Lucas, Kevin; Lorusso, Gian; Hendrickx, Eric (2010)