Browsing by author "Kovacs, F"

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Modifications of porous low-k by plasma treatments and wet cleans

Xu, Kaidong; Vereecke, Guy; Kesters, Els; Le, Quoc Toan; Lux, Marcel; Henry, Sally-Ann; Kraus, Harald; Archer, L.; Mertens, Paul; Kovacs, F; Dalmer, M; Gaulhofer, E; Luo, S.J.; Han, Q.Y.; Berry, I. (2007)
Post salicidation clean: selective removal of un-reacted NiPt towards NiPtSi(Ge)

Xu, Kaidong; Lauwers, Anne; Vos, Rita; Archer, L.; Kraus, Harald; Demeurisse, Caroline; Mertens, Sofie; Mertens, Paul; Henry, Sally-Ann; Gale, G.; Kovacs, F; Dalmer, M.; Gaulhofer, E (2007)