Browsing by author "Holmes, D."
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Characterisation of plasma etch related residues formed on top of ECD Cu
Baklanov, Mikhaïl; Conard, Thierry; Lanckmans, Filip; Vanhaelemeersch, Serge; Holmes, D.; Maex, Karen (1999) -
Characterisation of plasma etch releted residues formed on top of ECD Cu films
Baklanov, Mikhaïl; Conard, Thierry; Lanckmans, Filip; Vanhaelemeersch, Serge; Holmes, D.; Maex, Karen (2000)