Browsing by author "Impagnatiello, Andrea"

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Crystallinity and composition of Sc1-x(-y)SixP(y) silicides in annealed TiN/Sc/Si:P stacks for advanced contact applications

Pollefliet, Bert; Porret, Clément; Everaert, Jean-Luc; Sankaran, Kiroubanand; Piao, Xiaoyu; Rosseel, Erik; Conard, Thierry; Impagnatiello, Andrea; Shimura, Yosuke; Horiguchi, Naoto; Loo, Roger; Vantomme, Andre; Merckling, Clement (2024)