Browsing by author "Leunissen, Leonardus A.H."

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Improving defectivity for III-V CMP processes for <10 nm technology nodes

Teugels, Lieve; Ong, Patrick; Boccardi, Guillaume; Waldron, Niamh; Usman Ibrahim, Ansar; Siebert, Joerg Max; Leunissen, Leonardus A.H. (2014)