Browsing by author "Kumaresan, Vishnuvarthan"
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Simulation and measurement of the capacitance benefit of air gap interconnects for advanced technology nodes
Kumaresan, Vishnuvarthan; Wilson, Chris; Verdonck, Patrick; Van Besien, Els; Lazzarino, Frederic; Truffert, Vincent; Boemmels, Juergen; Tokei, Zsolt; Wong, T.K.S. (2014)