Browsing by author "Busnaina, Ahmed A."
Now showing items 1-2 of 2
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Collapse behavior and forces of multistack nanolines
Kim, Tae-Gon; Wostyn, Kurt; Mertens, Paul; Busnaina, Ahmed A.; Park, Jin-Goo (2010) -
Pattern collapse and particle removal forces of interest to semiconductor fabrication process
Kim, Tae-Gon; Wostyn, Kurt; Park, Jin-Park; Mertens, Paul; Busnaina, Ahmed A. (2008)