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Pattern collapse and particle removal forces of interest to semiconductor fabrication process
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Authors
Kim, Tae-Gon
;
Wostyn, Kurt
;
Park, Jin-Park
;
Mertens, Paul
;
Busnaina, Ahmed A.
Conference
9th International Symposium on Ultra Clean Processing of Semiconductor Surfaces - UCPSS
Title
Pattern collapse and particle removal forces of interest to semiconductor fabrication process
Publication type
Oral presentation
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