Browsing by author "Efremov, Alexander"
Now showing items 1-1 of 1
-
Mechanisms of film deposition from BCl3-based plasma during dry etching
Shamiryan, Denis; Efremov, Alexander; Serlenga, Vito; Baklanov, Mikhaïl; Boullart, Werner (2009)
Now showing items 1-1 of 1