Publication:

Mechanisms of film deposition from BCl3-based plasma during dry etching

Date

2009
Proceedings Paper
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Author(s)

Shamiryan, Denis
;
Efremov, Alexander
;
Serlenga, Vito
;
Baklanov, Mikhaïl
;
Boullart, Werner  

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1776 since deposited on 2021-10-18
Acq. date: 2025-10-28

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1776 since deposited on 2021-10-18
Acq. date: 2025-10-28

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