Browsing by author "Nakajima, Michio"
Now showing items 1-2 of 2
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Advanced organic polymers for the aggressive scaling of low-k materials
Pantouvaki, Marianna; Zhao, Larry; Huffman, Craig; Heylen, Nancy; Ono, Yukiharu; Nakajima, Michio; Nakatani, Koji; Beyer, Gerald; Baklanov, Mikhaïl (2010) -
Ultra low-k materials based on self-assembled organic polymers
Pantouvaki, Marianna; Zhao, Larry; Huffman, Craig; Vanstreels, Kris; Verdonck, Patrick; Ono, Yukiharu; Nakajima, Michio; Nakatani, Koji; Beyer, Gerald; Baklanov, Mikhaïl (2011)