Publication:

Advanced organic polymers for the aggressive scaling of low-k materials

Date

2010

Proceedings Paper

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Author(s)

Pantouvaki, Marianna

;

Zhao, Larry

;

Huffman, Craig

;

Heylen, Nancy

;

Ono, Yukiharu

;

Nakajima, Michio

;

Nakatani, Koji

;

Beyer, Gerald

;

Baklanov, Mikhaïl

Statistics

1928 since deposited on 2021-10-18

Acq. date: 2026-09-16