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Conference contributions
Advanced organic polymers for the aggressive scaling of low-k materials
Publication:
Advanced organic polymers for the aggressive scaling of low-k materials
Date
2010
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Pantouvaki, Marianna
;
Zhao, Larry
;
Huffman, Craig
;
Heylen, Nancy
;
Ono, Yukiharu
;
Nakajima, Michio
;
Nakatani, Koji
;
Beyer, Gerald
;
Baklanov, Mikhaïl
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1923
since deposited on 2021-10-18
Acq. date: 2025-10-23
Citations
Metrics
Views
1923
since deposited on 2021-10-18
Acq. date: 2025-10-23
Citations