Browsing by author "Sytsma, J."

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    • Advanced 193 nm step and scan technology 

      Stoeldraijer, J.; Mulkens, J.; Davies, G.; Sytsma, J.; Bakker, H.; Glatzel, H.; Wagner, C.; Roempp, O.; Boerret, R.; Goethals, Mieke (1998)

    • Introducing 193 nm lithography 

      Pollers, Ingrid; Jaenen, Patrick; Van Roey, Frieda; Goethals, Mieke; Ronse, Kurt; Davies, G.; Heskamp, B.; Bakker, H.; McCoo, E.; Mulkens, J.; Stoeldraijer, J.; Sytsma, J.; Van der Vleuten, B.; Vleeming, Bert; Tzviatkov, Plamen; Van Driessche, Veerle; Slater, S. (1998)