Browsing by author "Meshman, Boris"
Now showing items 1-2 of 2
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Stiffening and hydrophilisation of SOG low-k material studied by ellipsometric porosimetry, UV ellipsometry and laser-induced surface acoustic waves
Urbanowicz, Adam; Meshman, Boris; Schneider, Dieter; Baklanov, Mikhaïl (2007) -
Stiffening and hydrophilisation of SOG low-k material studied by ellipsometric porosimetry, UV ellipsometry and laser-induced surface acoustic waves
Urbanowicz, Adam; Meshman, Boris; Schneider, Dieter; Baklanov, Mikhaïl (2008)