Browsing by author "Borisov, Sergei"
Now showing items 1-1 of 1
-
The hidden energy tail of low energy electrons in EUV lithography
Fallica, Roberto; Rezvani, Seyed Javid; Nannarone, Stefano; Borisov, Sergei; De Simone, Danilo; Babin, Sergey; Lorusso, Gian; Vandenberghe, Geert (2019)