Browsing by author "Tettamanzi, Giuseppe"

Now showing items 1-1 of 1

Interface trap density metrology of state-of-the-art undoped Si n-FinFETs

Tettamanzi, Giuseppe; Paul, Abhijeet; Lee, Sunhee; Mehrotra, S.R.; Collaert, Nadine; Biesemans, Serge; Klimeck, G.; Rogge, Sven (2011)