Browsing by author "de Boeij, Wim"

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Mask blank stress birefringence requirements for hyper-NA lithography

Leunissen, Peter; Philipsen, Vicky; De Ruyter, Rudi; Demarteau, M.; van de Kerkhof, M.; de Boeij, Wim; Waelpoel, J.; Martin, Patrick; Cangemi, Michael (2005)