Browsing by author "Van Hemmen, J.L."
Now showing items 1-3 of 3
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Physical characterization of ALD Al2O3 films deposited on GaAs substrates
Franquet, Alexis; Conard, Thierry; Vandervorst, Wilfried; Sioncke, Sonja; Caymax, Matty; Delabie, Annelies; Heyns, Marc; Meuris, Marc; Brammertz, Guy; Van Hemmen, J.L.; Keuning, W; Kessels, W.M.M. (2008) -
Thermal and plasma enhanced atomic layer deposition of Al2O3 on GaAs substrates
Sioncke, Sonja; Caymax, Matty; Conard, Thierry; Delabie, Annelies; Franquet, Alexis; Heyns, Marc; Meuris, Marc; Urbanczyk, Adam; Van Hemmen, J.L.; Keunig, Wytze; Kessels, W.M.M. (2008) -
Thermal and plasma enhanced atomic layer deposition of Al2O3 on GaAs substrates
Sioncke, Sonja; Delabie, Annelies; Brammertz, Guy; Conard, Thierry; Franquet, Alexis; Caymax, Matty; Urbanczyk, Adam; Heyns, Marc; Meuris, Marc; Van Hemmen, J.L.; Keuning, Wytze; Kessels, W.M.M. (2009)