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Thermal and plasma enhanced atomic layer deposition of Al2O3 on GaAs substrates
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Authors
Sioncke, Sonja
;
Caymax, Matty
;
Conard, Thierry
;
Delabie, Annelies
;
Franquet, Alexis
;
Heyns, Marc
;
Meuris, Marc
;
Urbanczyk, Adam
;
Van Hemmen, J.L.
;
Keunig, Wytze
;
Kessels, W.M.M.
Conference
8th International Conference on Atomic Layer Deposition - ALD
Title
Thermal and plasma enhanced atomic layer deposition of Al2O3 on GaAs substrates
Publication type
Meeting abstract
Embargo date
9999-12-31
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