Publication:
Thermal and plasma enhanced atomic layer deposition of Al2O3 on GaAs substrates
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Views
1940 since deposited on 2021-10-17
3last month
3last week
Acq. date: 2025-12-10
Citations
Metrics
Views
1940 since deposited on 2021-10-17
3last month
3last week
Acq. date: 2025-12-10
Citations