Publication:

Thermal and plasma enhanced atomic layer deposition of Al2O3 on GaAs substrates

Date

2008

Meeting abstract

Simple item page Full metadata Statistics

Files

17000.pdf 436.3 KB

Author(s)

;

;

Conard, Thierry

;

Delabie, Annelies

;

Franquet, Alexis

;

;

;

Urbanczyk, Adam

;

Van Hemmen, J.L.

;

;

Kessels, W.M.M.

Statistics

1941 since deposited on 2021-10-17

1last month

Acq. date: 2026-01-26