Browsing by author "Verheijden, G.J.A.M."

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A feasibility study of dual damascene porous SiLK resin with spin-on hard masks

Hoofman, Romano; Michelon, Julien; Verheijden, G.J.A.M.; Waeterloos, Joost; Caluwaerts, Rudy; Schmidt, M.O.; Demeurisse, Caroline; Vandeweyer, Tom; Demuynck, Steven; Tokei, Zsolt; Beyer, Gerald (2004)