Browsing by author "Huging, Norbert"

Now showing items 1-1 of 1

Strain relaxation of SiGe/Si by He implantation: controlling dislocation sources at He precipitates

Huging, Norbert; Luysberg, Martina; Urban, Knut; Buca, Dan; Hollander, Bernd; Mantl, Siegfried; Morschbacher, Marcio; Fichtner, Paulo; Loo, Roger; Caymax, Matty (2005)