Publication:

Strain relaxation of SiGe/Si by He implantation: controlling dislocation sources at He precipitates

Date

2005

Proceedings Paper

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Author(s)

Huging, Norbert

;

Luysberg, Martina

;

;

;

Hollander, Bernd

;

Mantl, Siegfried

;

Morschbacher, Marcio

;

Fichtner, Paulo

;

;

Statistics

1884 since deposited on 2021-10-16

Acq. date: 2026-02-25