Browsing by author "Chen, Cheng-chi"

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Vacuum-ultraviolet-radiation damage of low-k dielectrics

Shohet, J. Leon; Kim, Sang-Heum; Nguyen, Ha; Xue, Panpan; Blatz, Joshua; Cheng, Haoyu; Lin, Yi-Hung; de Marneffe, Jean-Francois; Redzheb, Murad; Armini, Silvia; Chen, Cheng-chi; Wu, Yuting (2018)