Browsing by author "Hansen, Steve"
Now showing items 1-3 of 3
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Accurate models for EUV lithography
Hendrickx, Eric; Lorusso, Gian; Jiang, Jiong; Chen, Luoqi; Lui, Wei; Van Setten, Eelca; Hansen, Steve (2009) -
Accurate models for EUV Lithography
Hendrickx, Eric; Lorusso, Gian; Van Setten, Eelco; Hansen, Steve; Jiang, Jiong; Liu, Wei; Chen, Luogi (2009) -
The impact of mask birefringence on hyper-NA (NA>1.0) polarized imaging
Geh, Bernd; Flagello, Donis; Progler, Chris; Martin, Patrick; Leunissen, Peter; Hansen, Steve; De Boeij, Wim (2005)