The impact of mask birefringence on hyper-NA (NA>1.0) polarized imaging

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Authors
Geh, Bernd; Flagello, Donis; Progler, Chris; Martin, Patrick; Leunissen, Peter; Hansen, Steve; De Boeij, Wim
Conference
25th Annual BACUS Symposium on Photomask Technology
Title
The impact of mask birefringence on hyper-NA (NA>1.0) polarized imaging
Publication type
Proceedings paper
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