Publication:
The impact of mask birefringence on hyper-NA (NA>1.0) polarized imaging
Date
| dc.contributor.author | Geh, Bernd | |
| dc.contributor.author | Flagello, Donis | |
| dc.contributor.author | Progler, Chris | |
| dc.contributor.author | Martin, Patrick | |
| dc.contributor.author | Leunissen, Peter | |
| dc.contributor.author | Hansen, Steve | |
| dc.contributor.author | De Boeij, Wim | |
| dc.date.accessioned | 2021-10-16T01:41:41Z | |
| dc.date.available | 2021-10-16T01:41:41Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10488 | |
| dc.source.beginpage | 599210 | |
| dc.source.conference | 25th Annual BACUS Symposium on Photomask Technology | |
| dc.source.conferencedate | 3/10/2005 | |
| dc.source.conferencelocation | Monterey, CA USA | |
| dc.title | The impact of mask birefringence on hyper-NA (NA>1.0) polarized imaging | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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