Browsing by author "Raymaekers, Tom"

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Integration of Ruthenium-based Wordline in a 3-D NAND Memory Devices

Breuil, Laurent; El Hajjam, Gabriel; Ramesh, Siva; Ajaykumar, Arjun; Arreghini, Antonio; Zhang, Liping; Sebaai, Farid; Nyns, Laura; Raymaekers, Tom; Rosmeulen, Maarten; Van den Bosch, Geert; Furnemont, Arnaud (2020)