Integration of Ruthenium-based Wordline in a 3-D NAND Memory Devices

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Authors
Breuil, Laurent; El Hajjam, Gabriel; Ramesh, Siva; Ajaykumar, Arjun; Arreghini, Antonio; Zhang, Liping; Sebaai, Farid; Nyns, Laura; Raymaekers, Tom; Rosmeulen, Maarten; Van den Bosch, Geert; Furnemont, Arnaud
Conference
2020 IEEE International Memory Workshop (IMW)
Title
Integration of Ruthenium-based Wordline in a 3-D NAND Memory Devices
Publication type
Proceedings paper
Embargo date
9999-12-31
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