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Integration of Ruthenium-based Wordline in a 3-D NAND Memory Devices
Publication:
Integration of Ruthenium-based Wordline in a 3-D NAND Memory Devices
Date
2020
Proceedings Paper
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Breuil, Laurent
;
El Hajjam, Gabriel
;
Ramesh, Siva
;
Ajaykumar, Arjun
;
Arreghini, Antonio
;
Zhang, Liping
;
Sebaai, Farid
;
Nyns, Laura
;
Raymaekers, Tom
;
Rosmeulen, Maarten
;
Van den Bosch, Geert
;
Furnemont, Arnaud
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1966
since deposited on 2021-10-28
Acq. date: 2025-10-23
Citations
Metrics
Views
1966
since deposited on 2021-10-28
Acq. date: 2025-10-23
Citations