Browsing by author "Bartha, J.W."
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Modification of PECVD and SOG ultralow-k films by CO2 plasma
Olawumi, Teju Tunde; Levrau, E.; Krishtab, Mikhail; Detavernier, C.; Bartha, J.W.; Lazzarino, Frederic; Baklanov, Mikhaïl (2015)