Browsing by author "Gelpey, S."
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Influence of halo implant on leakage current and sheet resistance of ultrashallow p-n junctions
Faifer, V.N.; Schroder, D.K.; Current, M.I.; Clarysse, Trudo; Timans, P.J.; Zangerle, T.; Vandervorst, Wilfried; Wong, T.M.H.; Moussa, Alain; McCoy, S.; Gelpey, S.; Lerch, W. (2007-09)