Browsing by author "O'Neil, A.G."

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Strained Si/SiGe MOS technology: improving gate dielectric integrity

Olsen, S.H.; Yan, L.; Agaiby, R.; Escobedo-Cousin, A.G.; O'Neil, A.G.; Hellstrom, P.E.; Ostling, M.; Lyutovich, K.; Kasper, E.; Claeys, Cor; Parker, E.H.C. (2009)