Browsing by author "Hong, Eun Kee"
Now showing items 1-1 of 1
-
An investigation of ultra low-k dielectrics with high thermal stability for integration in memory devices
Hong, Eun Kee; Demuynck, Steven; Le, Quoc Toan; Baklanov, Mikhaïl; Carbonell, Laure; Van Hove, Marleen; Meynen, Herman (2007)