Browsing by author "Klein, Sophie"

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Detection of split design-related weak points in double patterning using PQW and bright-field defect inspection

Van Den Heuvel, Dieter; Cheng, Shaunee; Leray, Philippe; Wiaux, Vincent; Maenhoudt, Mireille; D'have, Koen; Jaenen, Patrick; Marcuccilli, Gino; Malik, Irfan; Klein, Sophie (2008)