Browsing by author "Chang, Mo H."

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Stress-induced positive charge in Hf-based gate dielectrics: impact on device performance and a framework for the defect

Zhao, C.Z.; Zhang, Jian F.; Chang, Mo H.; Peaker, Anthony R.; Hall, Stephen; Groeseneken, Guido; Pantisano, Luigi; De Gendt, Stefan; Heyns, Marc (2008)