Authors

Zhao, C.Z.; Zhang, Jian F.; Chang, Mo H.; Peaker, Anthony R.; Hall, Stephen; Groeseneken, Guido; Pantisano, Luigi; De Gendt, Stefan; Heyns, Marc

ISSN

0018-9383

Issue

7

Journal

IEEE Transactions on Electron Devices

Volume

55

Title

Stress-induced positive charge in Hf-based gate dielectrics: impact on device performance and a framework for the defect

Publication type

Journal article

Embargo date

9999-12-31