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Stress-induced positive charge in Hf-based gate dielectrics: impact on device performance and a framework for the defect

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1882 since deposited on 2021-10-17
3last month
Acq. date: 2026-05-19

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1882 since deposited on 2021-10-17
3last month
Acq. date: 2026-05-19

Citations