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Stress-induced positive charge in Hf-based gate dielectrics: impact on device performance and a framework for the defect
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Stress-induced positive charge in Hf-based gate dielectrics: impact on device performance and a framework for the defect
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Date
2008
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16754.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Zhao, C.Z.
;
Zhang, Jian F.
;
Chang, Mo H.
;
Peaker, Anthony R.
;
Hall, Stephen
;
Groeseneken, Guido
;
Pantisano, Luigi
;
De Gendt, Stefan
;
Heyns, Marc
Journal
IEEE Transactions on Electron Devices
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1876
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Acq. date: 2025-12-11
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Metrics
Views
1876
since deposited on 2021-10-17
1
last month
Acq. date: 2025-12-11
Citations