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Stress-induced positive charge in Hf-based gate dielectrics: impact on device performance and a framework for the defect
Publication:
Stress-induced positive charge in Hf-based gate dielectrics: impact on device performance and a framework for the defect
Date
2008
Journal article
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16754.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Zhao, C.Z.
;
Zhang, Jian F.
;
Chang, Mo H.
;
Peaker, Anthony R.
;
Hall, Stephen
;
Groeseneken, Guido
;
Pantisano, Luigi
;
De Gendt, Stefan
;
Heyns, Marc
Journal
IEEE Transactions on Electron Devices
Abstract
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1874
since deposited on 2021-10-17
Acq. date: 2025-10-24
Citations
Metrics
Views
1874
since deposited on 2021-10-17
Acq. date: 2025-10-24
Citations