Browsing by author "Cescato, Lucila"
Now showing items 1-2 of 2
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Diffractive phase-shift lithography photomask operating in proximity printing mode
Cirino, Giuseppe; Mansano, Ronaldo; Verdonck, Patrick; Cescato, Lucila; Goncalves Neto, Luiz (2010) -
Phase-shift photomask designed by scalar diffractiontheory
Cirino, Giuseppe; Mansano, Ronaldo; Verdonck, Patrick; Cescato, Lucila; Marega, E.; Goncalves Neto, Luiz (2009-09)