Browsing by author "Durr, Emma"
Now showing items 1-2 of 2
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A conformal oxide liner for through silicon vias by pulsed SA-CVD deposition
Sleeckx, Erik; Schaekers, Marc; Durr, Emma (2009) -
A conformal oxide liner for through silicon vias by pulsed SA-CVD deposition
Sleeckx, Erik; Schaekers, Marc; Durr, Emma (2009)